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发明名称
Mikrostrukturierter dreidimensionaler Sensor oder Aktor, sowie Verfahren zu seiner Herstellung
摘要
申请公布号
DE10140322(B4)
申请公布日期
2007.10.04
申请号
DE20011040322
申请日期
2001.08.16
申请人
ABB PATENT GMBH
发明人
VOGEL, ALBRECHT;WETZKO, MANFRED;KRIPPNER, PETER;SCHMIDT, CHRISTIAN
分类号
B81B3/00;B81B7/00;B81C1/00;C09D127/18
主分类号
B81B3/00
代理机构
代理人
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地址
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