| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an optical apparatus for laser beam machining, which optical apparatus has high accuracy of a converging position, and can carry out high speed machining. <P>SOLUTION: A diffraction type optical element 8 for dividing a laser beam to be converged by an fθlens 6 into a plurality of laser beams is arranged on an optical path between the fθlens 6 for converging the laser beam deflected by a galvano-mirror 4 and a printed board 7. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
