METHOD FOR ACTIVATING SURFACE OF CATALYST AND METHOD FOR GROWING CARBON NANOTUBE

摘要

PROBLEM TO BE SOLVED: To provide a method for activating the surface of a catalytic metal or an alloy for growing a CNT (carbon nonatube) and a method for growing the CNT efficiently even on a substrate on which the CNT is hardly grown. SOLUTION: A radical species is supplied to the surface of the substrate to activate the surface of a catalyst arranged on the substrate and then the CNT is grown. It is preferable that the radical species is obtained by decomposing at least one gas selected from a hydrogen atom-containing gas, a hydrocarbon gas and a carbon monoxide gas in plasma. Irradiation of the radical species is preferably carried out at 200-600°C. COPYRIGHT: (C)2008,JPO&INPIT