发明名称 SEMICONDUCTOR DEVICE FOR RELIABILITY EVALUATION
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device for reliability evaluation, capable of contriving shortening of the time for evaluation and analysis, while further improving the evaluation and analysis, in the semiconductor device for reliability evaluation which is equipped with a memory circuit comprising a flip flop. SOLUTION: The device is manufactured by a layout rule that is more relaxed than that of the memory circuit 10 and is equipped with a mitigation layout cell circuit 1, having at least a buffer 13. Furthermore, a plurality of upper layer wiring patterns 40a, 40b, 40c, 40d are formed for propagating the output signal from the memory circuit 10 or the mitigation layout cell circuit 1 to the upper layer side of the multilayers wiring structure. Furthermore, a selection circuit 43 is equipped for selectively extracting the output signal from the memory circuit 10 detouring a plurality of respective upper layer wiring patterns 40a, 40b, 40c, 40d or the mitigation layout cell circuit 1. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007258507(A) 申请公布日期 2007.10.04
申请号 JP20060082007 申请日期 2006.03.24
申请人 RENESAS TECHNOLOGY CORP 发明人 YOSHIZAWA TOMOAKI;ARAI KOJI
分类号 H01L21/82;H01L21/66;H01L21/822;H01L27/04 主分类号 H01L21/82
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