| 摘要 |
PROBLEM TO BE SOLVED: To provide a parameter-setting device of a substrate-treating device capable of managing parameters easily by confirming the recommended values of the parameters easily. SOLUTION: The current value of a parameter stored at a current value storage section 35a and the recommended value of a parameter stored at a recommended value storage section 35b are displayed adjacently at a display section 65. Thus, an operator can compare the current value of a parameter with the recommended value of the parameter at the display section 65 for confirmation, and can set the current value of the parameter, thus managing the parameter easily, and hence performing conditional setting efficiently. COPYRIGHT: (C)2008,JPO&INPIT
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