| 摘要 |
PROBLEM TO BE SOLVED: To uniformly drying both sides of a substrate with no unevenness using air knives symmetrically provided at upper and lower sides of the substrate via the substrate. SOLUTION: The air knives 20a, 20b symmetrically provided at upper and lower sides of the substrate 1 via the substrate 1 have a width longer than a width in the direction orthogonal to the moving direction of the substrate 1. A flow straightening plate 30 to which air blown out of the air knives 20a, 20b impinges is provided at a position separated from the width in the direction orthogonal to the moving direction of the substrate 1, and the impinging height of air blown out of the air knives 20a, 20b is kept at the height of the flow straightening plate 30, when the air blown out of the air knives 20a, 20b does not directly impinges on the substrate 1. COPYRIGHT: (C)2008,JPO&INPIT
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