发明名称 METHOD OF FABRICATING THIN FILM TRANSISTOR
摘要 A method of fabricating a thin film transistor includes forming an active layer on an insulating substrate; forming a gate insulation film on the insulating substrate; forming source, drain, and body contact regions which are separated by a channel region in the active layer; forming a gate on the gate insulation film; forming an interlayer insulation film on the insulating substrate; and forming source and drain electrodes electrically connected with the source and drain regions, respectively, wherein a voltage is applied to the channel region of the active layer through the body contact region, and the body contact region is connected to the source or drain electrode.
申请公布号 US2007231977(A1) 申请公布日期 2007.10.04
申请号 US20070760869 申请日期 2007.06.11
申请人 发明人 CHOI BYOUNG-DEOG;BAE SUNG-SIK;KIM WON-SIK
分类号 H01L21/84 主分类号 H01L21/84
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