| 摘要 |
A manufacturing execution system may be simulated, for example, for volume testing. In a semiconductor fabrication embodiment, a volume capability, such as a number of wafer starts, may be determined for a given version of a manufacturing execution system. In some cases, the simulation runs operations or scripts under more realistic conditions. A check can determine whether an appropriate condition exists at an appropriate lot or tool and the desired operation may then be run from that lot or tool from an appropriate state.
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