| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aluminum nitride sintered compact made excellently flat by polishing. <P>SOLUTION: The aluminum nitride sintered compact made excellently flat by polishing is manufactured by adding a small quantity of SiO<SB>2</SB>or MgO which is not present as a grain boundary phase by forming a solid solution with aluminum in the sintering into aluminum nitride powder and sintering the aluminum nitride powder at a low temperature of ≥1,600°C and ≤1,750°C with the improvement of the strength of the grain boundary. <P>COPYRIGHT: (C)2008,JPO&INPIT |
