| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a piezoelectric vibration chip having a smaller deteriorated surface layer and oscillation characteristics little different from designed oscillation characteristics. <P>SOLUTION: A tuning fork type crystal vibration chip 10 is separated and formed by wet etching, after a metal mask 30 is removed. Hence, a deteriorated layer 23 produced by dry etching can be exposed, and the deteriorated layer 23 can be removed. Accordingly, the manufacturing method can be obtained for the tuning fork type crystal vibration chip 10 having oscillation characteristics little different from designed oscillation characteristics. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
