发明名称 OPTICAL CHARACTERISTIC INSPECTION DEVICE, AND OPTICAL CHARACTERISTIC INSPECTION SYSTEM
摘要 <P>PROBLEM TO BE SOLVED: To provide an optical characteristic inspection device and an optical characteristic inspection method capable of inspecting precisely a shift between fellow optical axes, as to a transparent sample constituted by laminating a plurality of transparent materials having optical axes respectively to conform directions of the optical axes. <P>SOLUTION: The transparent sample 40 constituted by laminating the plurality of transparent materials having the optical axes respectively is arranged inside an optical path of an optical-resonant optical system 20, the optical axis is regulated to conform a laminated direction of the transparent sample 40 substantially with a direction of the optical path, an illumination light emitted from a prescribed laser beam source 10 is supplied to the optical-resonant optical system 20, an optical path length is changed periodically by moving a position of at least one reflecting mirror 22 included in the optical-resonant optical system 20, toward a direction of the optical path, a light intensity of the light emitted from the optical-resonant optical system 20 is detected by a light intensity detecting means 30, and prescribed processing is carried out based on the light intensity to calculate an optical characteristic of the transparent sample. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007256197(A) 申请公布日期 2007.10.04
申请号 JP20060083683 申请日期 2006.03.24
申请人 FUJIFILM CORP 发明人 OKAMOTO MEGUMI;KAWAHARA KARIN;MORITA MASATO
分类号 G01M11/00;G02F1/13;G02F1/1335;G02F1/13363 主分类号 G01M11/00
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