PLASMA GENERATION ELECTRODE, PLASMA REACTOR, AND EXHAUST GAS CLARIFICATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a plasma generation electrode capable of subjecting a predetermined constituent of a treatment object fluid to a reaction treatment by plasma having optimum intensity to each reaction only by running the treatment object fluid once.

SOLUTION: In this plasma generation electrode 1, each unit electrode 2 is formed with a plate-like ceramic body 3 used as a dielectric material, and a conductive film 4 arranged in the ceramic body 3; a plurality of the unit electrodes 2 are stacked at certain intervals; and the distances D between the conductive films 4 arranged in the unit electrodes 2 adjacent to each other are partially different, or the dielectric constants of the ceramic bodies constituting the unit electrode 2 are partially different. The plasma generation electrode 1 can generate plasma having partially different intensities in spaces V.

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