| 摘要 |
PROBLEM TO BE SOLVED: To provide an oxidized layer constriction-type surface-emitting laser element that controls oxidization of a low refractive point layer of a Distributed Bragg Reflector (DBR) mirror near an active layer, thus reducing a stress strain produced on the active layer. SOLUTION: An upper DBR mirror 42 with a low refractive point layer and a high refractive point layer alternately laminated thereon is divided into a primary region 44 located near an active layer, and a secondary region 46 located far from the active layer. An Al composition of low refractive point layer in the primary region 44 is made lower than that of the low refractive point layer in the secondary region 46, and oxidation of the low refractive point layer is controlled in the primary region 44 as generated when doing oxidation treatment for forming an Al oxidation layer 25. Due to a larger Al composition, the secondary region 46 decreases the number of pairs, thus reducing the number of processes. COPYRIGHT: (C)2008,JPO&INPIT
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