发明名称 |
Scanning transmission electron microscope and scanning transmission electron microscopy |
摘要 |
A scanning transmission electron microscope for scanning a primary electron beam on a sample, detecting a transmitted electron from the sample by a detector, and forming an image of the transmitted electron. The scanning transmission electron microscope includes an electron-optics system which enables switching back the transmitted electron beam to the optical axis by a predetermined quantity, and a determining unit for determining the quantity based on a displacement of the transmitted electron with respect to the detector caused by the scanning of the primary electron beam.
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申请公布号 |
US2007228277(A1) |
申请公布日期 |
2007.10.04 |
申请号 |
US20070806120 |
申请日期 |
2007.05.30 |
申请人 |
TSUNETA RURIKO;KOGUCHI MASANARI;HASHIMOTO TAKAHITO;NAKAMURA KUNIYASU |
发明人 |
TSUNETA RURIKO;KOGUCHI MASANARI;HASHIMOTO TAKAHITO;NAKAMURA KUNIYASU |
分类号 |
G01N23/00 |
主分类号 |
G01N23/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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