| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus and a method for generating excited and/or ionized particles in plasma, in which the apparatus may be used with large microwave capacity, and has a long effective life of a gas discharge chamber. <P>SOLUTION: An apparatus for generating excited and/or ionized particles from plasma gas in plasma has a microwave generator 19, a hollow waveguide 11, a gas discharge space 14 in which excited and/or ionized particles are generated, and a gas discharge chamber 12 including a dielectric 13 for forming the gas discharge space 14, the gas discharge chamber 12 being provided within the hollow waveguide 11; wherein the dielectric 13 forms an end face base 13a from which a side wall 13b extends while forming the gas discharge space 14, so that a microwave is discharged to the end face base 13a. <P>COPYRIGHT: (C)2008,JPO&INPIT |
