| 摘要 |
PROBLEM TO BE SOLVED: To provide a foreign matter inspection device, capable of displaying detection sensitivity for each of inspection conditions and inspection regions, capable of setting a management reference for each of the inspection regions, and capable of improving the accuracy of yield management. SOLUTION: This foreign matter inspection device is provided with an irradiation means for irradiating the inspection regions of the inspection object with inspection light, a strength detection means for detecting strength of reflection light or scattered light generated from the inspection region by irradiation of the inspection light, a position detection means for detecting a position of the reflection light or the scattered light in the inspection region, and a determining means for determining existence of a foreign matter existing in the inspection region by comparing with a threshold set for each divided inspection regions. The foreign matter inspection device is further provided with a display means, capable of displaying a threshold image showing the threshold in all of the inspection regions and an inspection sensitivity image converted from the threshold image. COPYRIGHT: (C)2008,JPO&INPIT |
