LIGHTING OPTICAL SYSTEM, EXPOSURE SYSTEM, AND DEVICE PRODUCTION METHOD

摘要

A lighting optical system capable of keeping a desired profile even if the outline shape of a light intensity distribution formed on a lighting pupil surface is varied using an axicon system. The lighting optical system, illuminating a surface to be illuminated (M) based on light from a light source (1), comprises a prism system (6) for varying the interval between a pair of prisms (6a, 6b) along an optical axis (AX) to vary a light intensity distribution at a lighting pupil surface (8a), and one or a plurality of movable lens(es) (4b) disposed between the prism system and the surface to be illuminated to be able to move in the optical axis direction according to a variation in the interval along the optical axis of the pair of the prisms.