| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device and method for removing an oxide film with a reduced pressure arc, which easily and accurately determines whether the oxide film is removed, does not need to open a vacuum container storing piping to be an treatment object, and eliminates waste of energy due to an excessive treatment, and also to provide program therefor. <P>SOLUTION: An anode is positioned in the piping in which the oxide film adheres on the inner surface. Then the piping or the anode is rotated around an axis having the direction approximately parallel to the pipe axis of the piping. The voltage between the anode and the piping is measured in such a state that the arc is generated by applying a DC voltage between the anode and the piping, a frequency spectrum of the voltage is calculated by a high-speed Fourier transformation from the date of the voltage wave form, and it is determined whether removal of the oxide film is finished based on the frequency component corresponding to the rotation speed of the piping or the anode in the frequency spectrum. <P>COPYRIGHT: (C)2008,JPO&INPIT |
