| 摘要 |
PROBLEM TO BE SOLVED: To provide a corrugate electrostatic actuator application range of which is widened by making it possible to take out the actuator output in a variety of forms. SOLUTION: The electrode consists of an elastic corrugate conductive sheet at least one side of which is an insulating surface, two or more electrodes are opposed such that at least one side becomes an insulating surface, phase of opposing corrugate electrodes is shifted by 180°, the electrodes are bonded at a part where the corrugates approach each other, electrode of the conductive sheet is divided electrically into regions so that a different potential can be applied in the wavelength direction of corrugate, and variation in wavelength of corrugate which varies depending on the voltage between the electrodes divided into regions is employed as the actuator output. COPYRIGHT: (C)2008,JPO&INPIT
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