MANUFACTURING METHOD OF CAPACITOR FOR ANALOG FUNCTIONS

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a capacitor which prevents constituents except an upper electrode 112 of the capacitor from being affected by a doping agent during doping and makes the upper and lower electrodes 112 and 106a of the capacitor have a sufficient doping level and almost the same doping concentration each other. SOLUTION: After being polished by means of CMP, the upper surface of the upper electrode 112 of the capacitor is doped by the same doping process as that of the lower electrode 106a of the capacitor. After the lower electrode 106a of the capacitor is formed, a thermal oxidation process is performed so that impurity ions implanted into the lower electrode 106a of the capacitor are isolated on the upper surface of the lower electrode of the capacitor. This causes the upper and lower electrodes of the capacitor to have almost the same doping concentration at the interface between them. COPYRIGHT: (C)2008,JPO&INPIT