| 摘要 |
PROBLEM TO BE SOLVED: To provide a practical method and device for detecting a small surface irregularity defect, capable of detecting surely a small concave and convex defect having a contour of the irregularity of several micrometers which is difficult to an automatic detection like the detection by a grinding stone, in an object to be inspected with a coarse surface roughness and a visual inspection which is usually difficult. SOLUTION: In the small surface irregularity defect detection method detecting the small surface irregularity defect of a magnetic metal object to be inspected, physical quantity resulting from a distortion of the defect part in the object to be inspected is measured, then using the measured value, the surface defect is detected. COPYRIGHT: (C)2008,JPO&INPIT
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