| 摘要 |
PROBLEM TO BE SOLVED: To provide a member which enables the effective utilization of a substrate film formed on the base material surface of a nozzle plate etc. SOLUTION: The liquid repellent film coated member comprises the substrate film such as a plasma-polymerized film 22 of a silicone material provided on the surface of the base material of the nozzle plate 18 etc. for flattening irregularities on the surface of the base material of the nozzle plate 18 etc. and a liquid-repellent film such as a molecular film 24 of polymerized metal alkoxide formed on the surface of the substrate film. Preferably, the metal alkoxide has a long-chain polymer group 24b containing fluorine. The substrate film contains SiO<SB>2</SB>, ZnO, NiO, SnO<SB>2</SB>, Al<SB>2</SB>O<SB>3</SB>, ZrO<SB>2</SB>, copper oxide, silver oxide, chromium oxide, or iron oxide, in addition to the plasma-polymerized film 22 of the silicone material, depending on the base material. COPYRIGHT: (C)2008,JPO&INPIT
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