INERTIA FORCE SENSOR

摘要

An inertia force sensor (50) includes a detection element (1) for detecting inertia forces, the detection element (1) has two first orthogonal arms (52) where first arms (2) and second arms (4) are connected substantially perpendicularly to each other, a support section (6) for supporting the two first arms (2), arms (8) for fixation, and weight sections (14). The second arms (4) have bend sections (4a), facing sections (16) bent at the bend sections (4a) and facing the second arms (4), drive electrodes (18) arranged at two facing sections (16) on one side and driving and vibrating the facing sections (16), and detection electrodes (20) arranged at two facing sections (16) on the other side and detecting strain of the facing sections (16). The inertia force sensor (50) is a small sized sensor capable of detecting different inertia forces and detecting inertia forces on detection axes.