| 摘要 |
A capacitive sensor is provided to detect a predetermined physical quantity by detecting an amount of capacitance between a stationary electrode and a movable electrode. A capacitive sensor has a stationary electrode(6) and a movable electrode(5) formed on a semiconductor layer(2). A portion of the stationary electrode and a portion of the movable electrode are opposed to each other, with a gap being formed therebetween. A detecting unit(8) detects a predetermined physical quantity by detecting capacitance that varies depending upon a size of the gap. In an arrangement that another portion of the stationary electrode and another portion of the movable electrode are opposed, an error compensating unit(9) reduces a detection error of the capacitance due to shift of the electrodes from each other in the detecting unit. |
