| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide the manufacturing method of a laminated piezoelectric element capable of obtaining a high piezoelectric constant, even in the laminated piezoelectric element employing Cu as the conductive material of an internal electrode layer. <P>SOLUTION: The laminated piezoelectric element 1 is provided with a plurality of piezoelectric layers 11 comprising at least Pb as an A site component and at least Ti as well as Zr as a B site component, while being constituted of perovskite type composite oxide shown by a general formula ABO<SB>3</SB>; and internal electrode layers 12 formed between the plurality of piezoelectric layers 11 while being constituted of conductive material of Cu. The manufacturing method of the laminated piezoelectric element 1 comprises a process for manufacturing a laminate 10 in which a piezoelectric layer precursor and an internal electrode layer precursor containing Cu as a conductive material are laminated, and a process for firing the laminate 10 in an atmosphere having oxygen partial pressure of 1×10<SP>-6</SP>-1×10<SP>-10</SP>atm. In this case, in the piezoelectric layer precursor, the containing mol amount of the A site component is specified so as to be 95.5-99.8 mol% in stoichiometric composition, and the average valence of B site component is 3.965-4.000 (here; 4,000 is not included). <P>COPYRIGHT: (C)2008,JPO&INPIT |
