DEVICE AND METHOD FOR PREPARING MODEL REGARDING RELATIONSHIP BETWEEN PROCESS AND QUALITY

摘要

PROBLEM TO BE SOLVED: To provide a device and a method for preparing a model capable of being obtained regarding the state of a process and capable of being used for supposing the quality of an object on the basis of various kinds of informations not limited by a prediction regarding a relationship with the quality.

SOLUTION: The model preparation device 10 inputs process status information which is the information on the process status obtained in a time series while executing each of the process steps constituting the process, and an inspection-result information on the object processed in the process are input, and generates a process-quality model indicating a relationship between the quantity of a process feature quantity extracted from the information on the process state and the inspection-result information. A feature-quantity extracting section 10b extracts of the process feature quantity for each unit object and at each process step. An analyzing section 10e prepares the process-quality model by carrying out an analysis by a data mining by using the process feature quantity and the inspection-result information associated with each other through the commonness of the related unit object.

COPYRIGHT: (C)2008,JPO&INPIT