COMPOSITION FOR FORMING ELECTRICAL INSULATION FILM, RELATED POLYMER AND METHOD FOR PRODUCING THE SAME, METHOD FOR PRODUCING ELECTRICAL INSULATION FILM, AND SILICA-BASED ELECTRICAL INSULATION FILM

摘要

PROBLEM TO BE SOLVED: To provide a polymer capable of forming an electrical insulation film with low water-adsorbing tendency and dielectric constant, high etching resistance and chemical liquid resistance and high mechanical strength; to provide a method for producing the polymer; to provide an electrical insulation film-forming composition containing the polymer; to provide a method for producing such electrical insulation film; and to provide silica-based electrical insulation film.

SOLUTION: The electrical insulation film-forming composition comprises the polymer obtained by co-condensation between (A) at least one silane monomer of the general formula(1), (B) a hydrolysable group-containing silane monomer and (C) a hydrolysable group-containing carbosilane in the presence of a basic catalyst and an organic solvent.

COPYRIGHT: (C)2008,JPO&INPIT