| 摘要 |
PROBLEM TO BE SOLVED: To provide a profile measurement device and method of an electron beam and a laser beam capable of accurately matching the focus and incident angle of the electron beam with those of the laser beam, of measuring four-dimensional profiles (temporal changes of three-dimensional profiles) of the electron beam and the laser beam, and of thereby remarkably increasing utilization efficiency of the laser beam. SOLUTION: This profile measurement device includes: a profile measurement device 30 for measuring a cross-sectional profile of each beam in the vicinity of a collision position at which the electron beam 1 and the laser beam 3 crash into each other; and a moving device 40 for continuously moving the profile measurement device in a predetermined direction nearly coincident with the axial directions of the respective beams. In addition, the temporal changes of the three-dimensional profiles of the electron beam and the laser beam are formed from the cross-sectional profiles by the profile measurement device, the position thereof in the predetermined direction, and oscillation timing of the beams by a profile formation device 50. COPYRIGHT: (C)2008,JPO&INPIT |
