| 摘要 |
PROBLEM TO BE SOLVED: To provide an MEMS device furnished with a mirror of which the warpage is suppressed and flatness is high. SOLUTION: The MEMS device 10 is provided with: a first substrate 11; a second substrate 12 having a ring-like form and arranged around the first substrate; a frame 13 arranged around the second substrate; a first hinge part 14 which connects the first substrate and the second substrate, and supports the first substrate rockably with respect to the second substrate: a second hinge part 15 which connects the second substrate and the frame, and rockably supports the second substrate with respect to the frame so that the rocking center axis is located on the same line as the rocking center axis of the first hinge part; a driving wiring 16 which is formed on the second substrate having sections parallel to the rocking center axes of the first substrate and the second substrate; and a magnetic field generation means 17 which is arranged at a position in a direction perpendicular to the rocking center axes of the first substrate and the second substrate at the outside of the second substrate and generates a magnetic field perpendicular to the rocking center axes of the first substrate and the second substrate. COPYRIGHT: (C)2008,JPO&INPIT
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