| 摘要 |
A silicon casting apparatus for producing polycrystal silicon ingot by heating a silicon melt ( 8 ) held in a mold ( 4 ) from above by a heater ( 3 ) and cooling it from below while changing the heat exchange area of a heat exchange region (HE), defined between a pedestal ( 5 ) having the mold ( 4 ) placed thereon and a bottom cooling member ( 6 ), in such a manner as to keep pace with the rise of the solid-liquid interface of the silicon melt ( 8 ), thereby causing unidirectional solidification upward along the mold ( 4 ); and a method of producing polycrystal silicon ingot using such apparatus. According to this production method, the temperature gradient given to the silicon melt ( 8 ) can be maintained at constant by adjusting the heat exchange area, so that polycrystal silicon ingot having good characteristics can be produced with good reproducibility.
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