发明名称 Patterning a Plurality of Fields on a Substrate to Compensate for Differing Evaporation Times
摘要 A method of patterning a substrate comprising a plurality of fields, including, inter alia, positioning a first volume of fluid on a first subset of the plurality of fields of the substrate, with the first volume of fluid being subjected to a first evaporation time; positioning a second volume of fluid on a second subset of the plurality of fields of the substrate, differing from the first subset, with the second volume of fluid being subjected to a second evaporation time, differing from the first evaporation time; and patterning the first and second subsets of the plurality of fields, with the first subset of the plurality of fields being patterned prior to the second subset of the plurality of fields being patterned, with a volume associated with the second subset of the plurality of fields being greater than a volume associated with the first subset of the plurality of fields to compensate for the second evaporation time being greater than the first evaporation time.
申请公布号 US2007231981(A1) 申请公布日期 2007.10.04
申请号 US20070692450 申请日期 2007.03.28
申请人 MOLECULAR IMPRINTS, INC. 发明人 SREENIVASAN SIDLGATA V.;SCHUMAKER PHILIP D.
分类号 H01L21/84;B81C99/00 主分类号 H01L21/84
代理机构 代理人
主权项
地址