发明名称 METHOD OF ALIGNING A PANEL
摘要 <p>A method for aligning a panel is provided to minimize an align error of a mask and a panel by calculating aligned positions of the mask and/or panel through an analytical equation. A panel with a first align mark and a mask with a second align mark corresponding to the first align mark are loaded(S1). A first coordinate data corresponding to a position of the first align mark and a second coordinate data corresponding to a position of the second align mark are generated(S2). A correction data is generated so that an error between the first coordinate data and the second coordinate data is below a predetermined reference value(S3). A panel and/or the mask is moved in response to the correction data(S4).</p>
申请公布号 KR100763347(B1) 申请公布日期 2007.10.04
申请号 KR20060055099 申请日期 2006.06.19
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 RYU, SUN JOONG;KIM, KWANG SUK;JUNG, SU YEON
分类号 H01L21/68;H01L21/027 主分类号 H01L21/68
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