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发明名称
Isolation method defining active fins, method for fabricating semiconductor device using the same, and semiconductor device fabricated thereby
摘要
申请公布号
KR100763330(B1)
申请公布日期
2007.10.04
申请号
KR20050123188
申请日期
2005.12.14
申请人
发明人
分类号
H01L21/76
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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