MOVABLE STRUCTURE AND METHOD OF CONTROLLING SAME

摘要

PROBLEM TO BE SOLVED: To accurately adjust the resonance frequency of the torsional operation of a movable plate. SOLUTION: The resonance frequency of the torsional operation of a mirror part 2 is varied by twisting the mirror part 2 while bending a spring part 4 by giving stress to the spring part 4 in the direction normal to the face of the mirror 2. Thus, the resonance frequency is easily adjustable to a desired value by adjusting the magnitude of the stress given to the spring part 4. COPYRIGHT: (C)2008,JPO&INPIT