发明名称 ACCELERATION SENSOR
摘要 PROBLEM TO BE SOLVED: To provide an acceleration sensor that can reduce or prevent degradation in the detection accuracy and reduce, or prevent occurrence of interference with surrounding parts or the like. SOLUTION: The x axis is set in the height method of cross sections of the first and second cantilever sections 2 and 3, x=0 is set at the upper ends of the cross sections of the cantilever sections 2 and 3; x=h is set at the lower ends of the cross sections of the cantilever sections 2 and 3, and the widths of the cross sections of the cantilever sections 2 and 3 are set to be W(x). At this time, the sectional shapes of the cantilever sections 2 and 3 are set so that W(x)≤W(0) or W (x)≤W(h) are established in the range of 0<x<h; and there exist (a) that establishes W(a) < W(0) and W(a) < W(h) which are established in the range of 0<a<h. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007256236(A) 申请公布日期 2007.10.04
申请号 JP20060084583 申请日期 2006.03.27
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 NAKANISHI TSUTOMU;OOGOSHI HIDEO
分类号 G01P15/12;H01L29/84 主分类号 G01P15/12
代理机构 代理人
主权项
地址