摘要 |
PROBLEM TO BE SOLVED: To provide an acceleration sensor that can reduce or prevent degradation in the detection accuracy and reduce, or prevent occurrence of interference with surrounding parts or the like. SOLUTION: The x axis is set in the height method of cross sections of the first and second cantilever sections 2 and 3, x=0 is set at the upper ends of the cross sections of the cantilever sections 2 and 3; x=h is set at the lower ends of the cross sections of the cantilever sections 2 and 3, and the widths of the cross sections of the cantilever sections 2 and 3 are set to be W(x). At this time, the sectional shapes of the cantilever sections 2 and 3 are set so that W(x)≤W(0) or W (x)≤W(h) are established in the range of 0<x<h; and there exist (a) that establishes W(a) < W(0) and W(a) < W(h) which are established in the range of 0<a<h. COPYRIGHT: (C)2008,JPO&INPIT
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