Polymerisierbare fluorierte Verbindung, Herstellungsverfahren, Polymer, Resistzusammenstellung und Strukturierungsverfahren

摘要

A polymerizable fluorinated compound having formula (2a) or (2b) wherein R 1 and R 2 are H or C 1 -C 20 alkyl or fluoroalkyl, R 3 is H, F or C 1 -C 4 alkyl or fluoroalkyl, and R is H or a protective group is polymerized into a fluorinated polymer which is used as a base polymer to formulate a resist composition having transparency to laser light of wavelength ‰¤ 300 nm, alkali development amenability, and dry etch resistance.