| 摘要 |
PROBLEM TO BE SOLVED: To provide a polyimide film having slippery properties advantageous for treatment, and adhesiveness at the production of the polyimide film and the production of an electronic component by using the film. SOLUTION: The slippery polyimide film is characterized by 50-5,000 protrusions having 3-300 nm heights and present on the surface of the film, 0.03-1.0 coefficient of static friction and 0.03-1.0 coefficient of dynamic friction. Especially, the film free from a particle is preferable. COPYRIGHT: (C)2008,JPO&INPIT |
