| 摘要 |
PROBLEM TO BE SOLVED: To provide a method which enables an extension of the use of a microsphere probe as a sensor to the field of optical surface measurements and acquiring a wide range of information related to matter. SOLUTION: The present invention uses a tapered optical fiber including a microspherical end part as a near-field probe. A transmission fiber is arranged in the vicinity of a microsphere so as to bind optical test signals in the microsphere by a short time period. A series of extremely narrow Whispering Gallery Mode (WGM) oscillations are generated in the microsphere with related electromagnetic fields radiated from the microsphere to the outside. The microsphere probe is moved over the surface of an optical device to be analyzed (or the device is moved immediately under the microsphere). Any abnormalities (defects, scratches, or similar imperfections) on the surface disturb a pattern of electromagnetic fields and are reflected in changes in measured output power from the microsphere. COPYRIGHT: (C)2008,JPO&INPIT
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