| 摘要 |
PROBLEM TO BE SOLVED: To provide surface inspection apparatus with functionality to easily can observe and track condition of defective wafer end throughout process. SOLUTION: A wafer surface inspection apparatus for inspecting wafer circumference comprises lens system and CCD camera to photograph the image of the wafer circumference, a memory means for storing the photographed image data, and display means for displaying the image data stored in a memory device. Furthermore, more specifically, it also is characterized by own functionality that it is put on pre-alignment section to turn wafer, uses lens system and CCD camera to record images of corresponding to a full circumference around the wafer edge in the area for performing alignment of orientation flat section or notch section of wafer, and saves these images in a memory device, to be displayed on CRT. COPYRIGHT: (C)2008,JPO&INPIT
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