| 摘要 |
PROBLEM TO BE SOLVED: To provide a display panel inspection device which relaxes physical restriction from an aspect of a device constitution and accurately measures the position of the foreign matter or flaws on a display panel in the interlaminar unit of the panel, and to provide a display panel inspection method using it. SOLUTION: The display panel inspection device has a stage for supporting a liquid crystal display panel, an illumination light source for irradiating the surface of the liquid crystal display panel that is supported on the stage and an imaging means for imaging the surface of the liquid crystal display panel illuminated by the illumination light source. The illumination light source is constituted, capable of changing the incident angle of the irradiated light into the surface of the liquid crystal display panel. COPYRIGHT: (C)2008,JPO&INPIT
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