Micromechanical flow sensor with tensile coating

摘要

A sensor integrated on a semiconductor device ( 1 ), in particular a flow sensor, comprises a measuring element ( 2 ) on a membrane ( 5 ). In order to prevent a buckling of the membrane ( 5 ) a tensile coating ( 9 ) is applied. The coating covers the membrane, but it preferably leaves all the active electronic components integrated on the semiconductor chip ( 1 ) uncovered, such that their electrical properties are not affected.