发明名称 |
MAGNETISCHES ELEMENT MIT ISOLIERENDEN BEUTELN UND ZUGEHÖRIGES HERSTELLUNGSVERFAHREN |
摘要 |
An improved and novel device and fabrication method for a magnetic element, and more particularly a magnetic element (10) including a first electrode (14), a second electrode (18) and a spacer layer (16). The first electrode (14) and the second electrode (18) include ferromagnetic layers (26 & 28). A spacer layer (16) is located between the ferromagnetic layer (26) of the first electrode (14) and the ferromagnetic layer (28) of the second electrode (16) for permitting tunneling current in a direction generally perpendicular to the ferromagnetic layers (26 & 28). The device includes insulative veils (34) characterized as electrically isolating the first electrode (14) and the second electrode (18), the insulative veils (34) including non-magnetic and insulating dielectric properties. Additionally disclosed is a method of fabricating the magnetic element (10) with insulative veils (34) that have been transformed from having conductive properties to insulative properties through oxygen plasma ashing techniques. |
申请公布号 |
DE60128678(T2) |
申请公布日期 |
2007.10.04 |
申请号 |
DE2001628678T |
申请日期 |
2001.04.20 |
申请人 |
FREESCALE SEMICONDUCTOR INC. |
发明人 |
CHEN, EUGENE YOUJUN;DURLAM, MARK;TEHRANI, SAIED N.;DEHERRERA, MARK;KERSZYKOWSKI, GLORIA;KYLER, KELLY WAYNE |
分类号 |
G11B5/39;H01F10/32;H01F41/30;H01L21/8246;H01L27/105;H01L43/08 |
主分类号 |
G11B5/39 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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