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发明名称
Verfahren zum Reinigen und Trocknen von zu verarbeitenden Objekte
摘要
申请公布号
DE69838273(D1)
申请公布日期
2007.10.04
申请号
DE1998638273
申请日期
1998.06.16
申请人
TOKYO ELECTRON LTD.
发明人
NAKASHIMA, SATOSHI;KAMIKAWA, YUJI;HONDA, KAZUYUKI
分类号
H01L21/00;H01L21/304;B08B3/04
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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