| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method of a display panel capable of rapidly restoring a process by promptly discovering trouble by inspecting the condition of a coating device immediately after phosphor paste coating to minimize the number of defective substrates; to provide its inspection device; and to provide a manufacturing method using them. SOLUTION: In this inspection method, a coated substrate 10 coated with a liquid material in grooves formed on the substrate itself is irradiated with light from an illumination means 63; light reflected from the coated substrate is photographed by a photographing means 62 to one-dimensionally or two-dimensionally acquire the luminous energy of the reflected light as luminance information; and coating defective parts of the liquid material are inspected by subjecting the acquired luminance information to signal processing. The luminance information is acquired by keeping, between 40°and 80°, a smaller angle formed by a plane intersecting perpendicularly with the longitudinal direction 68 of the grooves, and a plane including an incident optical axis between the illumination means and the photographing means, and a regular reflection optical axis and vertical to the bottom surfaces of the grooves. COPYRIGHT: (C)2008,JPO&INPIT
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