| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-definition X-ray image that can remove the influence of penumbra and is further clear. SOLUTION: An X-ray source 22 and X-ray detector 20 can spirally scan surroundings of a specimen 28. Further, the X-ray source 22 can vary the wavelength. A signal processor 34 can obtain X-ray images of various conditions, and can perform division and integration of the images of different conditions. Thus, the contrast can be improved, the penumbra can be removed from the images of different distance d from the specimen by a penumbra corrector 36. COPYRIGHT: (C)2008,JPO&INPIT
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