发明名称 Carbon nanotube via interconnect
摘要 An electronic device that facilitates improved electrical and thermal performance and/or allows fabrication of smaller electronic devices exhibiting excellent performance characteristics, especially for devices operating at microwave frequencies, includes an input/output pad, and a carbon nanotube extending from the input/output pad to provide wafer-level nano-interconnect for flip chip interconnections and die stacking on a substrate.
申请公布号 US2007228926(A1) 申请公布日期 2007.10.04
申请号 US20060391852 申请日期 2006.03.29
申请人 TEO KIAT C;WONG WAI K;PAN BINGHUA 发明人 TEO KIAT C.;WONG WAI K.;PAN BINGHUA
分类号 H01J63/04 主分类号 H01J63/04
代理机构 代理人
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