| 摘要 |
A device for generating excited and/or ionized particles in a plasma made of a process gas, having an inner chamber, which is implemented as cylindrical and in which a plasma zone may be generated, a coaxial internal conductor, a coaxial external conductor, an inlet, using which process gas may be supplied into the inner chamber, and an outlet using which process gas may be discharged from the inner chamber, wherein the coaxial internal conductor at least partially has a curved shape.
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