发明名称 |
Computer-Implemented Methods and Systems for Determining a Configuration for a Light Scattering Inspection System |
摘要 |
Computer-implemented methods and systems for determining a configuration for a light scattering inspection system are provided. One computer-implemented method includes determining a three-dimensional map of signal-to-noise ratio values for data that would be acquired for a specimen and a potential defect on the specimen by the light scattering inspection system across a scattering hemisphere of the inspection system. The method also includes determining one or more portions of the scattering hemisphere in which the signal-to-noise ratio values are higher than in other portions of the scattering hemisphere based on the three-dimensional map. In addition, the method includes determining a configuration for a detection subsystem of the inspection system based on the one or more portions of the scattering hemisphere.
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申请公布号 |
US2007229809(A1) |
申请公布日期 |
2007.10.04 |
申请号 |
US20060278624 |
申请日期 |
2006.04.04 |
申请人 |
KLA-TENCOR TECHNOLOGIES CORP. |
发明人 |
BELYAEV ALEXANDER;KAVALDJIEV DANIEL;MURALI AMITH;PETRENKO ALEKSEY;KIRK MIKE D.;SHORTT DAVID;HAAS BRIAN L.;HALLER KURT L. |
分类号 |
G01N21/88 |
主分类号 |
G01N21/88 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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