R2R CONTROLLER TO AUTOMATE THE DATA COLLECTION DURING A DOE

摘要

A system and a computer-implemented method of operating a processing system in which a process model is selected from a menu of process models (320) available from the processing system. In the module and method, an experiment is designed (330) having a number of process runs for characterization of the selected process model. Process runs to collect data (340) are executed on a processing tool coupled to the processing system. The actual process results from the process runs are measured. The process model is solved for coefficients of the process model (350).