SYSTEM AND METHOD OF POWERING A SONIC ENERGY SOURCE AND USE OF THE SAME TO PROCESS SUBSTRATES

摘要

A system and method of supplying power to a sonic energy source that minimizes damage to substrate devices during processing while increasing processing efficiency and/or effectiveness. The system and method utilize the concept of ramping the amplitude and/or varying the frequency of the electrical signal used to drive the sonic energy source, thereby resulting in corresponding ramping and/or variations in the amplitude and frequency of the resulting sonic energy being applied to the substrate. A method of processing a substrate with sonic energy comprising: a) supporting at least one substrate in a process chamber; b) generating a base electrical signal; c) transmitting the base electrical signal to an amplifier, the amplifier converting the base electrical signal into an output electrical signal having a peak amplitude; d) transmitting the output electrical signal to a transducer, the transducer converting the output electrical signal into corresponding sonic energy; e) applying the sonic energy to the at least on substrate supported in the process chamber; and f) ramping the peak amplitude of the output electrical signal.